system. For this study, it is essential to diagnose the characteristics of miniaturized devices and materials with the spatial resolution as high as several nanometers or even higher. Therefore, novel methods, e.g., scanning probe microscopy, should be developed for such the high-resolution diagnostics. The second purpose of this book is to explore the possibility of developing new methods for these diagnostics by utilizing local interaction between materials and electron, photon, atomic force, and so on. Conformation and structure of the materials of the mesoscopic system can be modified by enhancing the local interaction between the materials and electromagnetic field. This modification can suggest the possibility of novel nano-fabrication methods. The third purpose of this book is to explore the methods for such nano-fabrication.