E. A. Deulin / R. A. Nevshupa / Yu V. Panfilov / V. P. Mikhailov
Mechanics and Physics of Precise Vacuum Mechanisms
- Springer Netherlands
- 2012
- Taschenbuch
- 248 Seiten
- ISBN 9789400731066
In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision based on magnetic and electric rheology; precise harmonic rotary and not-coaxial nut-screw linear motion vacuum feedthroughs with technical parameters considered the best in the world; elastically deformed vacuum motion feedthroughs without friction couples usage; the computer system of vacuum mechanisms failure predicting.
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