Markus Graf / Andreas Hierlemann / Henry P. Baltes / Diego Barrettino
CMOS Hotplate Chemical Microsensors
- Springer Berlin Heidelberg
- 2007
- Gebunden
- 140 Seiten
- ISBN 9783540695615
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
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