This book constitutes the refereed proceedings of the First Conference on Cybersecurity of Industrial Control Systems, CyberICS 2015, and the First Workshop on the Security of Cyber Physical Systems, WOS-CPS 2015, held in Vienna, Austria, in September 2015 in conjunction with ESORICS 2015, the 20th annual European Symposium on Research in Computer Security. The 6 revised full papers and 2 short papers of CyberICS 2015 presented together with 3 revised full papers of WOS-CPS 2015 were carefully reviewed and selected from 28 initial submissions. CyberICS 2015 focuses on topics covering ICSs, including cyber protection and cyber defense of SCADA systems, plant control systems, engineering workstations, substation