Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications
- Springer New York
- 2014
- Taschenbuch
- 572 Seiten
- ISBN 9781461497448
In Advanced ULSI interconnects ¿ fundamentals and applications we bring a comprehensive description of copper-based interconnect technology for ultra- lar- scale integration (ULSI) technology for integrated circuit (IC) application. In- grated circuit technology is the base for all modern electronics systems. You can ?nd electronics systems today everywhere: from toys and home appliances to a- planes and space shuttles. Electronics systems form the hardware that together with software are the bases of the modern information society. The rapid growth and vast exploitation of modern electronics system create a strong demand for new and improved electronic circuits as demonstrated by the amazing progress in the ?eld of
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